Microchip Fabrication: A Practical Guide to Semiconductor Processing, Sixth Edition

Excellent book

Almost through chapter 6. Great overview of the wafer fab process. Reads easily.

This is a 6th edition but the updating is erratic. There are many sections where you will see the discussion of methods end with 0.35 micron processes. Yes, other sections go further, but it leaves you guessing about the usefulness of the information. There are also places where there are typos and diagrams with wrong labels that must have been there for a decade. I don't feel at all like I understand how a 22nm process works, or even 65 nm. For example the thinnest spin-on coating discussed is about 10x thicker than what I see discussed in research papers and you will not find any clue how that is achieved.As an introductory text it has the advantage of giving you an all-around view of how complicated the industry is. You will find discussions of everything from coating your shoes to coating high aspect contacts, from super pure chemicals to super-small self aligned processes. At the end of the book you probably know most of the processes in use.You will, however, probably not feel confident you have learned how the most modern chips are produced. This book requires a total overhaul if it is to remain relevant, now just tinkering.

The book has almost too much info, but the figures/images look like cave drawings. If you want to see a full color photo of any kind of process equipment, or a fab, you can find it on google. You will not find it in this book. That being said, as a Microelectronics student training to work in a fab, this will get job done academically. It's a bit out of date. Pre-14nm, but these texts cant keep up with the industry, so no stars off for that.

This book is OK, but there are many typos and some wrong information in the book.